Nanowerk6 个月
Reactive Ion Etching (RIE): Precise Nanoscale Patterning for Advanced Devices
What is Reactive Ion Etching (RIE)? Reactive Ion Etching (RIE) is a dry etching technique widely used in the fabrication of micro- and nanodevices. It combines the chemical reactivity of reactive ...
来自MSN9 个月
Deep ICP-RIE Etched Trenches with Sidewall Slope Control of GaAs-type High Power PLDs
Our team at LASER COMPONENTS Canada used inductively coupled plasma-reactive ion etching (ICP-RIE) to achieve precise waveguide trench geometries with sidewall angles of 60 ° to 70 ...
中国粉体网2 个月
德国Sentech等离子刻蚀机ICP-RIE SI 500
高速刻蚀 对于具有高深宽比的高速硅基MEMS刻蚀，光滑的侧壁可以通过室温下气体切换工艺或低温工艺即可很容易地实现。 自主研发的ICP等离子源 三螺旋平行板天线(PTSA)等离子源是SENTECH高端等离子体工艺设备的独特属性。PTSA源能生成具有高离子密度和低离子 ...
Michigan Technological University21 天
Plasma and Characterization
The etching and characterization room contains a suite of tools for dry etching and characterization of samples. This includes three dry etchers with a range of capabilities, while characterization ...
Nanowerk5 个月
Wet Etching in Nanotechnology: Essential for Precision Nanostructures
It's worth noting that wet etching differs from dry etching techniques, such as reactive ion etching (RIE), which use plasma to remove material from a substrate. While both techniques are used in ...
AZOM1 年
Reactive Ion Etching (RIE) — PlasmaPro 100 RIE
Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Request A Quote Download PDF Copy Request A Quote Download ...
AZOM2 年
High-Density Plasma to Achieve Fast Etching and Deposition Rates—PlasmaPro 100 Cobra
Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The PlasmaPro 100 Cobra ICP RIE system ...
unr.edu8 个月
Davidson Foundation Cleanroom
Oxford Instruments Plasma Technology PlasmaPro 100 Cobra 300 ICP RIE ALE The Oxford Instruments Cobra is perhaps the highest performance R&D etch system in the academic world. Our system is configured ...
Engineering360 News6 年
Dry Etching (Plasma / RIE) Semiconductor Foundry Services
Company Information: Universal Semiconductor Inc is one of the early pioneering semiconductor companies in the world that extended and developed innovative technologies for diverse applications. They ...
Engineering360 News6 年
Dry Etching (Plasma / RIE) MEMS Foundry
Our goal is to establish reliable supply chains for your MEMS products. We have strong experience... [See More] Capabilities: Dry Etching (Plasma / RIE); Inspection / Testing; Plating; Oxidation / ...
Hackaday3 年
Garage Semiconductor Fab Gets Reactive-Ion Etching Upgrade
At least that’s [Sam]’s plan, which his new reactive-ion etching setup aims to make possible. While his Z1 dual differential amplifier chip was a huge success, the photolithography process he ...