Tight pitch routing metal with high-NA EUV One of the most challenging patterning layers is the tightest pitch routing metal layers with expected minimum pitch of ~20nm for 1D metal lines with High-NA ...
Figure 1. A: Block with fixed macros Figure 1. B: Clk* nets routing in layer metal-10(Horizontal shape) and metal-11(Vertical shape) Macros have ESD (Electro Static Discharge) diodes that need a ...
CS is the critical signal that needs to be shielded from noise sources. Let’s assume the critical signal is in Mth metal layer, where M is one of the routing layers for metal. Conventional shielding ...
Omni 3D arbitrarily interleaves metal layers for both signal/power with FETs in 3D (i.e., nFETs and pFETs are stacked in 3D). Thus, signal/power routing layers have fine-grained, all-sided access to ...
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